Semiconductor devices including a thick metal layer and a bump

ABSTRACT

A semiconductor device includes an interlayer insulating layer disposed on a substrate; a plurality of middle interconnections disposed in the interlayer insulating layer; a pad disposed on the interlayer insulating layer; an upper interconnection disposed on the interlayer insulating layer; a protective insulating layer covering an edge of the pad, the upper interconnection, and a horizontal gap between the pad and the upper interconnection, the protective insulating layer having an opening on the pad; and a bump disposed on the pad, the bump extending on the protective insulating layer and overlapping the upper interconnection from a top-down view. At least one of the plurality of middle interconnections from among middle interconnections vertically closest to the pad has a first vertical thickness, the pad has a second vertical thickness that is twice to 100 times the first vertical thickness, a length of the gap between the pad and the upper interconnection is 1 μm or more, and an upper surface of the protective insulating layer is planar.

CROSS-REFERENCE TO RELATED APPLICATION

This U.S. non-provisional patent application is a continuationapplication of U.S. patent application Ser. No. 18/093,880, filed Jan.23, 2023, which is a continuation application of U.S. patent applicationSer. No. 17/328,365, filed May 24, 2021, which is a continuationapplication of U.S. patent application Ser. No. 16/795,658, filed Feb.20, 2020, which claims priority under 35 U.S.C. § 119 to and the benefitof Korean Patent Application No. 10-2019-0097284, filed on Aug. 9, 2019,in the Korean Intellectual Property Office (KIPO), the disclosure ofeach of which is incorporated herein by reference in its entirety.

BACKGROUND 1. Field

Devices and methods consistent with example embodiments relate tosemiconductor devices having a thick metal layer and a bump and methodsof forming the semiconductor devices.

2. Description of Related Art

Research is being conducted into semiconductor devices adopting bumpsformed on electrode pads. A shape of the bump may be determined by aconfiguration of a protective insulating layer adjacent to the electrodepad and the bump. A step of the bump causes problems such as an increasein contact resistance and bonding defects.

SUMMARY

The example embodiments of the inventive concept are directed toproviding semiconductor devices and methods of forming the same, whichhave improved current drivability, a high signal transmission rate, andhigh physical/chemical reliability.

According to some embodiments, a semiconductor device includes aninterlayer insulating layer disposed on a substrate; a plurality ofmiddle interconnections disposed in the interlayer insulating layer; apad disposed on the interlayer insulating layer; an upperinterconnection disposed on the interlayer insulating layer; aprotective insulating layer covering an edge of the pad, the upperinterconnection, and a horizontal gap between the pad and the upperinterconnection, the protective insulating layer having an opening onthe pad; and a bump disposed on the pad, the bump extending on theprotective insulating layer and overlapping the upper interconnectionfrom a top-down view. At least one of the plurality of middleinterconnections from among middle interconnections vertically closestto the pad has a first vertical thickness, the pad has a second verticalthickness that is twice to 100 times the first vertical thickness, alength of the gap between the pad and the upper interconnection is 1 μmor more, and an upper surface of the protective insulating layer isplanar.

According to some embodiments, a semiconductor device includes aninterlayer insulating layer disposed on a substrate; a plurality ofactive/passive elements disposed on the substrate; a plurality of middleinterconnections disposed in the interlayer insulating layer; a paddisposed on the interlayer insulating layer; an upper interconnectiondisposed on the interlayer insulating layer; a protective insulatinglayer covering an edge of the pad, the upper interconnection, and a gapbetween the pad and the upper interconnection, the protective insulatinglayer having an opening on the pad; a bump disposed on the pad, the bumpextending on the protective insulating layer and vertically overlappingthe upper interconnection; and a through electrode passing through thesubstrate and connected to the plurality of middle interconnections orthe pad. One of the plurality of middle interconnections from amongmiddle interconnections vertically closest to the pad is electricallyconnected to the pad and has a first vertical thickness, the pad has asecond vertical thickness that is twice to 100 times the first verticalthickness, the gap between the pad and the upper interconnection is 1 μmor more, and an upper surface of the protective insulating layer isplanar.

According to some embodiments, a semiconductor device includes aninterlayer insulating layer disposed on a substrate; a plurality ofmiddle interconnections disposed in the interlayer insulating layer; apad disposed on the interlayer insulating layer; an upperinterconnection disposed on the interlayer insulating layer; aprotective insulating layer covering an edge of the pad, the upperinterconnection, and a gap between the pad and the upperinterconnection, the protective insulating layer having an opening onthe pad; and a bump disposed on the pad, the bump extending on theprotective insulating layer and vertically overlapping the upperinterconnection. One of the plurality of middle interconnections fromamong middle interconnections vertically closest to the pad has a firstvertical thickness, the pad has a second vertical thickness that istwice to 100 times the first vertical thickness, and a horizontal lengthof the gap between the pad and the upper interconnection is greater thanor equal to the second vertical thickness, and an upper surface of theprotective insulating layer is planar.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1 to 3 are cross-sectional views each illustrating a portion of asemiconductor device according to embodiments of the inventive concept.

FIG. 4 is an enlarged view illustrating portions of FIGS. 1 to 3 .

FIGS. 5 to 8 are cross-sectional views each illustrating a portion of asemiconductor device according to embodiments of the inventive concept.

FIG. 9 is a cross-sectional view illustrating semiconductor devicesaccording to embodiments of the inventive concept.

FIG. 10 is an enlarged view of a portion of FIG. 9 .

FIG. 11 is an enlarged view of some components of FIG. 9 .

FIGS. 12 to 22 are cross-sectional views for describing methods offorming semiconductor devices according to embodiments of the inventiveconcept.

DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS

FIGS. 1 to 3 are cross-sectional views each illustrating a portion of asemiconductor device according to embodiments of the inventive concept.FIG. 4 is an enlarged view illustrating portions of FIGS. 1 to 3 . Thesemiconductor devices according to the embodiments of the inventiveconcept may include a thick top metal (TTM). A semiconductor device, asdescribed herein, may include a semiconductor chip or die includingconnection terminals to an external device, may include a semiconductorpackage including one or more semiconductor chips disposed on a packagesubstrate, and including connection terminals to an external device, ormay include a package-on-package device.

Referring to FIG. 1 , semiconductor devices according to an embodimentof the inventive concept may include a substrate 21, a plurality ofinterlayer insulating layers 31, 32, 33, 34, and a plurality of middleinterconnections 41 and 42, a plurality of contact plugs 52, a pad 61, aplurality of upper interconnections 62, a plurality of protectiveinsulating layers 71 and 72, an opening 73W, and a first bump 89. Theplurality of interlayer insulating layers 31, 32, 33, 34, and 35 mayinclude a first interlayer insulating layer 31, a second interlayerinsulating layer 32, a third interlayer insulating layer 33, a fourthinterlayer insulating layer 34, and a fifth interlayer insulating layer35. Two or more adjacent layers of the plurality of interlayerinsulating layers 31, 32, 33, 34, and 35 may be together be described asan interlayer insulating layer. The plurality of middle interconnections41 and 42 may include a plurality of first middle interconnections 41and a plurality of second middle interconnections 42. The plurality ofprotective insulating layers 71 and 72 may together be described as aprotective insulating layer, and may include a first protectiveinsulating layer 71 and a second protective insulating layer 72. Thefirst bump 89 may include a pillar structure 85 and a solder 87. Thepillar structure 85 may have a mostly flat top and bottom surface andsubstantially vertical side surfaces. The solder 87 may have a mostlyflat bottom surface, but a rounded, curved top surface and side surface.The pillar structure 85 may include a barrier layer 81, a seed layer 82,and a pillar 83. The pillar structure 85 may include a first portion 85Aand a second portion 85B.

It will be understood that, although the terms first, second, third etc.may be used herein to describe various elements, components, regions,layers and/or sections, these elements, components, regions, layersand/or sections should not be limited by these terms. Unless the contextindicates otherwise, these terms are only used to distinguish oneelement, component, region, layer or section from another element,component, region, layer or section, for example as a naming convention.Thus, a first element, component, region, layer or section discussedbelow in one section of the specification could be termed a secondelement, component, region, layer or section in another section of thespecification or in the claims without departing from the teachings ofthe present invention. In addition, in certain cases, even if a term isnot described using “first,” “second,” etc., in the specification, itmay still be referred to as “first” or “second” in a claim in order todistinguish different claimed elements from each other.

Also, the various pads of a device described herein may be conductiveterminals connected to internal wiring of the device, and may transmitsignals and/or supply voltages between an internal wiring and/orinternal circuit of the device and an external source. For example, chippads of a semiconductor chip may electrically connect to and transmitsupply voltages and/or signals between an integrated circuit of thesemiconductor chip and a device to which the semiconductor chip isconnected. The various pads may be provided on or near an externalsurface of the device and may generally have a planar surface area(often larger than a corresponding surface area of the internal wiringto which they are connected) to promote connection to a furtherterminal, such as a bump or solder ball, and/or an external wiring.

The first to fifth interlayer insulating layers 31 to 35 may besequentially stacked on the substrate 21. Each of the plurality ofmiddle interconnections 41 and 42 may be disposed in the first to fifthinterlayer insulating layers 31 to 35 on the substrate 21. The pluralityof second middle interconnections 42 may be disposed relatively fartherfrom an upper surface of the substrate 21 than the plurality of firstmiddle interconnections 41. For example, the plurality of first middleinterconnections 41 may be disposed in the first interlayer insulatinglayer 31. The plurality of second middle interconnections 42 may bedisposed in the second interlayer insulating layer 32. The plurality ofsecond middle interconnections 42 may exhibit a first thickness d1.

The plurality of contact plugs 52 may extend into the plurality ofinterlayer insulating layers 31, 32, 33, 34, and 35. In an embodiment,each of the plurality of contact plugs 52 may pass through the fifthinterlayer insulating layer 35, the fourth interlayer insulating layer34, and the third interlayer insulating layer 33 and may contact acorresponding one of the plurality of second middle interconnections 42.It will be understood that when an element is referred to as being“connected” or “coupled” to or “on” another element, it can be directlyconnected or coupled to or on the other element or intervening elementsmay be present. In contrast, when an element is referred to as being“directly connected” or “directly coupled” to another element, or as“contacting” or “in contact with” another element, there are nointervening elements present. Other words used to describe therelationship between elements should be interpreted in a like fashion(e.g., “between” versus “directly between,” “adjacent” versus “directlyadjacent,” etc.). The term “contact,” as used herein, refers to adirection connection (i.e., touching) unless the context indicatesotherwise.

The pad 61 and the plurality of upper interconnections 62 may bedisposed at a higher level (e.g., higher vertical level) than theplurality of middle interconnections 41 and 42, with respect to a topsurface of the substrate 21. In an embodiment, the pad 61 and theplurality of upper interconnections 62 may be disposed directly on thefifth interlayer insulating layer 35. The pad 61 and the plurality ofupper interconnections 62 may be physically and electrically connectedto the plurality of contact plugs 52. For example, the pad 61 and eachof the plurality of upper interconnections 62 may contact an uppersurface of at least a corresponding one of the plurality of contactplugs 52.

The plurality of middle interconnections 41 and 42 may be disposedbetween the pad 61 and the substrate 21. The pad 61 and the plurality ofupper interconnections 62 may be physically and electrically connectedto the plurality of second middle interconnections 42 via the pluralityof contact plugs 52. The plurality of second middle interconnections 42may be vertically closer to the pad 61 than the plurality of firstmiddle interconnections 41 are with respect to the pad 61, and may bethe closest middle interconnections to the pad 61 from among the middleinterconnections 41 and 42, in a vertical direction (e.g., the mostadjacent to the pad 61 in the vertical direction). In an embodiment, aselected one of the plurality of second middle interconnections 42 maybe closest to the pad 61 from among the plurality of middleinterconnections 41 and 42. Also, a selected one of the plurality ofsecond middle interconnections 42 may be electrically connected to thepad 61, for example, through contact plugs 52. Each of the plurality ofmiddle interconnections 41 and 42 may have a lateral width greater thana vertical height thereof. Each of the plurality of contact plugs 52 mayhave a vertical height greater than a lateral width thereof.

The pad 61 may exhibit a second thickness d2. Each of the plurality ofupper interconnections 62 may exhibit a third thickness d3. In anembodiment, the pad 61 and the plurality of upper interconnections 62may include the same material formed simultaneously.

The third thickness d3 may be substantially equal to the secondthickness d2. The pad 61 and the plurality of upper interconnections 62may be disposed at substantially the same vertical level. Lower surfacesof the pad 61 and the plurality of upper interconnections 62 may besubstantially coplanar. Upper surfaces of the pad 61 and the pluralityof upper interconnections 62 may be substantially coplanar.

Terms such as “same,” “equal,” “planar,” or “coplanar,” as used hereinwhen referring to orientation, layout, location, shapes, sizes,compositions, amounts, or other measures do not necessarily mean anexactly identical orientation, layout, location, shape, size,composition, amount, or other measure, but are intended to encompassnearly identical orientation, layout, location, shapes, sizes,compositions, amounts, or other measures within acceptable variationsthat may occur, for example, due to manufacturing processes. The term“substantially” may be used herein to emphasize this meaning, unless thecontext or other statements indicate otherwise. For example, itemsdescribed as “substantially the same,” “substantially equal,” or“substantially planar,” may be exactly the same, equal, or planar, ormay be the same, equal, or planar within acceptable variations that mayoccur, for example, due to manufacturing processes.

The second thickness d2 may be greater than the first thickness d1. Thesecond thickness d2 may be at least twice the first thickness d1. In anembodiment, the second thickness d2 may be twice to 100 times the firstthickness d1, and in some embodiments, the second thickness d2 may bethree times to ten times the first thickness d1. The second thickness d2may be 1 μm or more. In an embodiment, the second thickness d2 may rangefrom 1 μm to 5 μm. The first thickness d1, in some embodiments, mayrange from 0.01 μm to 0.5 μm. For example, in one embodiment, the secondthickness d2 may be about 2.5 μm. An interconnection resistance may bereduced due to thicknesses (i.e., the second and third thicknesses d2and d3) of the pad 61 and the plurality of upper interconnections 62.Configurations of the pad 61 and the plurality of upper interconnections62 may have an effect of increasing current drivability.

Each of the plurality of upper interconnections 62 may be disposedadjacent to the pad 61. Each of the plurality of upper interconnections62 may be spaced apart from the pad 61. Each gap G1 between theplurality of upper interconnections 62 and the pad 61 may be 1 μm ormore. Each of the gaps G1 between the plurality of upperinterconnections 62 and the pad 61 may range from 1 μm to 10 μm. In anembodiment, each of the gaps G1 may range from 2.5 μm to 7.2 μm. Each ofthe gaps G1 between the plurality of upper interconnections 62 and thepad 61 may be greater than or equal to the second thickness d2. Signaldelays, such as a resistance-capacitance (RC) delay, may be minimizeddue to the gaps G1 between the plurality of upper interconnections 62and the pad 61. The configurations of the pad 61 and the plurality ofupper interconnections 62 may have an effect of increasing operationspeed. Though not shown in FIG. 1 , in example embodiments showingfeatures similar of FIG. 1 or other figures, from a top-down view, pad61 has a substantially circular shape or may have a square, rectangular,or linear shape (e.g., elongated rectangular shape), and upperinterconnections 62 have a linear shape (e.g., elongated rectangularshape).

The plurality of protective insulating layers 71 and 72 may cover anedge of the pad 61 (e.g., a lateral side or lateral sides, and theadjacent upper surface of the pad 61), the plurality of upperinterconnections 62, and the gaps G1 between the pad 61 and theplurality of upper interconnections 62. The opening 73W may be disposedon the pad 61 and pass through the plurality of protective insulatinglayers 71 and 72. For example, the opening 73W may pass through theentire protective insulating layer 72 and part of the protectiveinsulating layer 71. Upper surfaces of the plurality of protectiveinsulating layers 71 and 72 may be substantially planar.

The first protective insulating layer 71 may cover the edge of the pad61, the plurality of upper interconnections 62, and the gaps G1 betweenthe pad 61 and the plurality of upper interconnections 62. The uppersurface of the first protective insulating layer 71 may be substantiallyplanar. The second protective insulating layer 72 may be disposed on thefirst protective insulating layer 71. The second protective insulatinglayer 72 may include, or be formed of, a different material from thefirst protective insulating layer 71. The upper surface of the secondprotective insulating layer 72 may be substantially planar.

In an exemplary embodiment, each of the first protective insulatinglayer 71 and the second protective insulating layer 72 may include asingle layer or a multi-layered structure. Each of the first protectiveinsulating layer 71 and the second protective insulating layer 72 mayinclude a first oxide layer such as high-density plasma (HDP) oxide, asecond oxide layer formed using tetraethyl orthosilicate (TEOS) orfluorinated tetraethyl orthosilicate (FTEOS), or a combination thereof.

The first bump 89 may be disposed on the pad 61 and extend on theplurality of protective insulating layers 71 and 72 and overlap theplurality of upper interconnections 62. The first bump 89 may extendinto the plurality of protective insulating layers 71 and 72 and beconnected to the pad 61 through the opening 73W, for example bycontacting the pad 61 through the opening 73W. In this manner, a firstpart of the bottom surface of the first bump 89 may contact a topsurface of the pad 61 through the opening 73W and a second part of thebottom surface of the first bump 89 may contact a top surface of anuppermost layer of the protective insulating layer (e.g., layers 71 and72). The pillar structure 85 may be disposed on the pad 61 and extend onthe plurality of protective insulating layers 71 and 72 and overlap theplurality of upper interconnections 62. The pillar structure 85 mayextend into the plurality of protective insulating layers 71 and 72 andbe connected to the pad 61 through the opening 73W. The solder 87 may bedisposed on the pillar structure 85.

The first portion 85A of the pillar structure 85 may be arranged on theopening 73W. The second portion 85B of the pillar structure 85 mayextend on the plurality of protective insulating layers 71 and 72. Thesecond portion 85B may overlap the edge of the pad 61, the plurality ofupper interconnections 62, and the gaps G1 between the pad 61 and theplurality of upper interconnections 62. For example, in one embodiment,the pillar structure 85 and the solder 87 are substantially circularfrom a top-down view, and the first portion 85A is surrounded by thesecond portion 85B, each of which are substantially circular.

A lower surface of the second portion 85B may contact a top of thesecond protective insulating layer 72. The lower surface of the secondportion 85B may be formed to be substantially planar. The first portion85A may extend into the plurality of protective insulating layers 71 and72 and be connected to the pad 61 through the opening 73W. A lowersurface of the first portion 85A may be in contact with the pad 61. Anupper surface of the first portion 85A may be closer to the substrate 21than an upper surface of the second portion 85B. An upper surface of thesecond portion 85B may be formed to be substantially planar. Physicaland chemical reliability of the first bump 89 may be ensured due toplanar configurations of the first protective insulating layer 71, thesecond protective insulating layer 72, and the pillar structure 85.

Referring to FIG. 2 , semiconductor devices according to an embodimentof the inventive concept may include a substrate 21, a plurality ofinterlayer insulating layers 31, 32, 33, 34, and a plurality of middleinterconnections 41 and 42, a plurality of contact plugs 52, a pad 61,an upper interconnection 62, a plurality of protective insulating layers71 and 72, an opening 73W, and a first bump 89. The upperinterconnection 62 may be disposed on one side of the pad 61. The pad 61and the upper interconnection 62 may be disposed at substantially thesame level. An upper surface of each of the first protective insulatinglayer 71 and the second protective insulating layer 72 may besubstantially planar.

Referring to FIG. 3 , semiconductor devices according to an embodimentof the inventive concept may include a substrate 21, a plurality ofinterlayer insulating layers 31, 32, 33, 34, and a plurality of middleinterconnections 41 and 42, a plurality of contact plugs 52, a pad 61, aplurality of protective insulating layers 71 and 72, an opening 73W, anda first bump 89. This example does not include contact plugs 52 or upperinterconnections 62. An upper surface of each of a first protectiveinsulating layer 71 and a second protective insulating layer 72 may besubstantially planar.

Referring to FIG. 4 , the pad 61 and each of the plurality of upperinterconnections 62 may include a lower barrier layer 65, a conductivelayer 66, and an upper barrier layer 67. The conductive layer 66 may beinterposed between the lower barrier layer 65 and the upper barrierlayer 67. In an embodiment, the lower barrier layer 65 may include atitanium (Ti) layer. The conductive layer 66 may include an aluminum(Al) layer or a copper (Cu) layer. The upper barrier layer 67 mayinclude a titanium/titanium nitride (Ti/TiN) layer (e.g., it may includemore than one layer such as a titanium layer covered with a titaniumnitride layer).

FIGS. 5 to 8 are cross-sectional views illustrating portions ofsemiconductor devices according to embodiments of the inventive concept.

Referring to FIG. 5 , semiconductor devices according to an embodimentof the inventive concept may include a substrate 21, a plurality ofinterlayer insulating layers 31, 32, 33, 34, and 35, a plurality ofmiddle interconnections 41 and 42, a plurality of contact plugs 52, apad 61, a plurality of upper interconnections 62, a plurality ofprotective insulating layers 76 and 77, an opening 73W, and a first bump89. The plurality of protective insulating layers 76 and 77 may includea first protective insulating layer 76 and a second protectiveinsulating layer 77.

In an embodiment, the first protective insulating layer 76 may includesilicon nitride, and the second protective insulating layer 77 mayinclude silicon oxide. The first protective insulating layer 76 mayconformally cover surfaces of the fifth interlayer insulating layer 35,the pad 61, and the plurality of upper interconnections 62. The secondprotective insulating layer 77 may cover the first protective insulatinglayer 76. The opening 73W may pass through the second protectiveinsulating layer 77 and the first protective insulating layer 76. Anupper surface of the second protective insulating layer 77 may include aplurality of concave portions which are each disposed between the pad 61and one of the plurality of upper interconnections 62. A lower surfaceof a pillar structure 85 may include a plurality of convex portionswhich are disposed between the pad 61 and the plurality of upperinterconnections 62 from a top-down view, and which correspond to theplurality of concave portions of the second protective insulating layer77. An upper surface of the pillar structure 85 may include a pluralityof concave portions which are disposed between the pad 61 and theplurality of upper interconnections 62 from a top-down view, and whichcorrespond to and vertically overlap the plurality of convex portions ofthe pillar structure 85 and the plurality of concave portions of thesecond protective insulating layer 77.

Referring to FIG. 6 , semiconductor devices according to an embodimentof the inventive concept may include a substrate 21, a plurality ofinterlayer insulating layers 31, 32, 33, 34, and a plurality of middleinterconnections 41 and 42, a plurality of contact plugs 52, a pad 61, aplurality of upper interconnections 62, a plurality of protectiveinsulating layers 71, 72, and 74, an opening 73W, and a first bump 89.The plurality of protective insulating layers 71, 72, and 74 may includea first protective insulating layer 71, a second protective insulatinglayer 72, and a third protective insulating layer 74. The thirdprotective insulating layer 74 may be disposed between the firstprotective insulating layer 71 and the second protective insulatinglayer 72. The third protective insulating layer 74 may include, or beformed of, a different material from the second protective insulatinglayer 72. The third protective insulating layer 74 may be formed in alater process from the first protective insulating layer 71. A bottomsurface of the third protective insulating layer 74 may contact a topsurface of the first protective insulating layer 71 at an interfacetherebetween.

Upper surfaces of the first protective insulating layer 71, the pad 61,and the plurality of upper interconnections 62 may be substantiallycoplanar. The first protective insulating layer 71 may fill gaps G1between the pad 61 and the plurality of upper interconnections 62. Thethird protective insulating layer 74 may cover an edge of the pad 61,the plurality of upper interconnections 62, and the gaps G1 between thepad 61 and the plurality of upper interconnections 62. An upper surfaceof each of the first protective insulating layer 71, the secondprotective insulating layer 72, and the third protective insulatinglayer 74 may be substantially planar. The opening 73W may pass throughthe second protective insulating layer 72 and the third protectiveinsulating layer 74.

Referring to FIG. 7 , semiconductor devices according to an embodimentof the inventive concept may include a substrate 21, a plurality ofinterlayer insulating layers 31, 32, 33, 34, and a plurality of middleinterconnections 41 and 42, a plurality of contact plugs 52, a pad 61, aplurality of upper interconnections 62, a plurality of protectiveinsulating layers 71, 72, and 74, an opening 73W, and a first bump 89.The opening 73W may exhibit a trapezoidal shape from a cross-sectionalview, having a lower width smaller than an upper width thereof.Sidewalls of the opening 73W may be inclined, so that a width of theopening 73W increases in a direction away from a top surface of thesubstrate 21.

Referring to FIG. 8 , semiconductor devices according to an embodimentof the inventive concept may include a substrate 21, a plurality ofinterlayer insulating layers 31, 32, 33, 34, and 35, a plurality ofmiddle interconnections 41 and 42, a plurality of contact plugs 52, apad 61, a plurality of upper interconnections 62, a plurality ofprotective insulating layers 71, 72, and 78, an opening 73W, and a firstbump 89. The plurality of protective insulating layers 71, 72, and 78may include a first protective insulating layer 71, a second protectiveinsulating layer 72, and a third protective insulating layer 78.

The third protective insulating layer 78 may be disposed on the secondprotective insulating layer 72. In an embodiment, the third protectiveinsulating layer 78 may include photosensitive polyimide (PSPI). Theopening 73W may pass through the third protective insulating layer 78,the second protective insulating layer 72, and the first protectiveinsulating layer 71. The opening may be partly rectangular from across-sectional view, and partly trapezoidal. The first bump 89 mayextend into the plurality of protective insulating layers 71, 72, and 78and be connected to the pad 61 through the opening 73W.

FIG. 9 is a cross-sectional view illustrating a semiconductor deviceaccording to embodiments of the inventive concept. FIG. 10 is anenlarged view of a portion 90 of FIG. 9 . FIG. 11 is an enlarged view ofsome components of FIG. 9 . A semiconductor device according to certainembodiments of the inventive concept may include a multi-chip package.In an embodiment, a semiconductor device may include a high-bandwidthmemory (HBM). In an embodiment, a semiconductor device may includedynamic random access memory (DRAM).

Referring to FIG. 9 , a semiconductor device may include a printedcircuit board (PCB) PC, an interposer IP, a plurality of semiconductorchips CP, LD, and MD1 to MD4, a plurality of bumps 89, 489, 589, and689, and an encapsulant 99. The plurality of semiconductor chips CP, LD,and MD1 to MD4 may include a microprocessor CP, a control chip LD (e.g.,controller), and a plurality of memory chips MD1 to MD4. The pluralityof memory chips MD1 to MD4 may include a first memory chip MD1, a secondmemory chip MD2, a third memory chip MD3, and a fourth memory chip MD4.At least some of the plurality of memory chips MD1 to MD4 may include aplurality of through electrodes 93. The plurality of bumps 89, 489, 589,and 689 may include a plurality of first bumps 89, a plurality of secondbumps 489, a plurality of third bumps 589, and a plurality of fourthbumps 689.

The PCB PC may include a rigid PCB, a flexible PCB, or a rigid-flexiblePCB. The PCB PC may include a multi-layered circuit substrate. The PCBPC may correspond to a package substrate or a main board. The pluralityof fourth bumps 689 may be disposed on a lower surface of the PCB PC.The interposer IP may be disposed on the PCB PC. The plurality of thirdbumps 589 may be disposed between the PCB PC and the interposer IP. Inthe case where the PCB PC corresponds to a main board, the interposer IPmay correspond to a package substrate.

The plurality of semiconductor chips CP, LD, and MD1 to MD4 may bedisposed on the interposer IP. The interposer IP may include asemiconductor substrate such as a silicon interposer. In an embodiment,the microprocessor CP and the control chip LD are disposed on theinterposer IP. The plurality of second bumps 489 may be disposed betweenthe microprocessor CP and the interposer IP and between the control chipLD and the interposer IP. The microprocessor CP may include variouskinds of processors such as a graphics processing unit (GPU) or anapplication processor (AP). The control chip LD may include variouselements such as a memory controller. The control chip LD may beconnected to the microprocessor CP via the interposer IP and theplurality of second bumps 489.

The plurality of memory chips MD1 to MD4 may be sequentially stacked onthe control chip LD. Each of the plurality of memory chips MD1 to MD4may include a plurality of components which are similar to thosedescribed with reference to FIGS. 1 to 8 . For instance, each of theplurality of memory chips MD1 to MD4 may include the plurality of firstbumps 89. In an embodiment, the plurality of first bumps 89 may bedisposed between the plurality of memory chips MD1 to MD4 and betweenthe first memory chip MD1 and the control chip LD. The plurality ofmemory chips MD1 to MD4 may be connected to the control chip LD via theplurality of first bumps 89 and the plurality of through electrodes 93.

The encapsulant 99 may be disposed on the control chip LD to cover theplurality of memory chips MD1 to MD4. The encapsulant 99 may include anepoxy molding compound (EMC), an underfill, or a combination thereof.

In an exemplary embodiment, the control chip LD may include a masterchip. Each of the plurality of memory chips MD1 to MD4 may denote aslave chip. In an exemplary embodiment, the first memory chip MD1 maydenote a master chip. Each of the second memory chip MD2, the thirdmemory chip MD3, and the fourth memory chip MD4 may denote a slave chip.

Referring to FIGS. 9 and 10 , the third memory chip MD3 may include athrough electrode 93, a protruding electrode 95, a substrate insulatinglayer 97, a substrate 21, a plurality of interlayer insulating layers31, 32, 33, 34, and 35, a plurality of middle interconnections 41 and42, a plurality of contact plugs 52, a pad 61, a plurality of upperinterconnections 62, a plurality of protective insulating layers 71 and72, and a first bump 89. The substrate insulating layer 97 may cover onesurface of the substrate 21. The substrate 21 may be disposed betweenthe substrate insulating layer 97 and first interlayer insulating layer31. The protruding electrode 95 may be disposed on the substrateinsulating layer 97. The through electrode 93 may pass through thesubstrate 21 and be connected to a corresponding one of the plurality offirst middle interconnections 41 and the protruding electrode 95. In anembodiment, the through electrode 93 may pass through the substrate 21and be connected to a corresponding one of the plurality of secondmiddle interconnections 42 or the pad 61.

The second memory chip MD2 may include a configuration similar to thatof the third memory chip MD3. A solder 87 of the third memory chip MD3may be adhered to the protruding electrode 95 of the second memory chipMD2. The solder 87 of the fourth memory chip MD4 may be adhered to theprotruding electrode 95 of the third memory chip MD3.

Referring to FIGS. 9 to 11 , each of the plurality of semiconductorchips CP, LD, and MD1 to MD4 may include a plurality of active/passiveelements. In an embodiment, the plurality of active/passive elements mayinclude a plurality of cell transistors 149 and a plurality of cellcapacitors 159 which are disposed on the substrate 21.

For example, each of the plurality of memory chips MD1 to MD4 mayinclude the substrate 21, a device isolation layer 123, a sixthinterlayer insulating layer 131, a seventh interlayer insulating layer132, the plurality of cell transistors 149, a bit line BL, plurality ofburied contact plugs BC, and the plurality of cell capacitors 159. Eachof the plurality of cell transistors 149 may include a gate electrode141, a gate dielectric layer 143, and plurality of source/drain regions145. Each of the plurality of cell capacitors 159 may include a firstelectrode 151, a capacitor dielectric layer 153, and a second electrode155.

The plurality of cell transistors 149 and the plurality of cellcapacitors 159 may constitute a plurality of memory cells MC. Each ofthe plurality of cell transistors 149 may correspond to a recessedchannel transistor. In an embodiment, each of the plurality of celltransistors 149 may include a fin field effect transistor (finFET), amulti-bridge channel (MBC) transistor, a nanowire transistor, a verticaltransistor, a recessed channel transistor, a three-dimensional (3D)transistor, planar transistor, or a combination thereof. The firstelectrode 151 may be referred to as a lower electrode, a storageelectrode, or a storage node. The second electrode 155 may be referredto as an upper electrode, a plate electrode, or a plate node. Each ofthe plurality of cell capacitors 159 may include various kinds ofthree-dimensional (3D) capacitors.

The sixth interlayer insulating layer 131 may be disposed at a similarlevel to the first interlayer insulating layer 31 of FIG. 1 . Theseventh interlayer insulating layer 132 may be disposed at a similarlevel to the second interlayer insulating layer 32 or the thirdinterlayer insulating layer 33 of FIG. 1 . The plurality of celltransistors 149 and the plurality of cell capacitors 159 may beelectrically connected to at least one of the plurality of middleinterconnections 41 and 42, the pad 61, and the plurality of upperinterconnections 62 of FIG. 1 corresponding thereto.

FIGS. 12 to 19 are cross-sectional views for describing methods offorming semiconductor devices according to embodiments of the inventiveconcept.

Referring to FIG. 12 , a plurality of interlayer insulating layers 31,32, 33, 34, and 35, a plurality of middle interconnections 41 and 42, aplurality of contact plugs 52, a pad 61, and a plurality of upperinterconnections 62 are formed on a substrate 21. The plurality ofinterlayer insulating layers 31, 32, 33, 34, and 35 may include a firstinterlayer insulating layer 31, a second interlayer insulating layer 32,a third interlayer insulating layer 33, a fourth interlayer insulatinglayer 34, and a fifth interlayer insulating layer 35. The plurality ofmiddle interconnections 41 and 42 may include a plurality of firstmiddle interconnections 41 and a plurality of second middleinterconnections 42.

The substrate 21 may include a semiconductor substrate such as a siliconwafer or a silicon-on-insulator (SOI) wafer. The plurality of interlayerinsulating layers 31, 32, 33, 34, and 35 may be stacked on the substrate21. The plurality of interlayer insulating layers 31, 32, 33, 34, and 35may include silicon oxide, silicon nitride, silicon oxynitride, a low-kdielectric, a high-k dielectric, or a combination thereof. The fourthinterlayer insulating layer 34 may correspond to an etch stop layer. Thefourth interlayer insulating layer 34 may include, or be formed of, adifferent material from the fifth interlayer insulating layer 35. Forexample, the first interlayer insulating layer 31, the second interlayerinsulating layer 32, the third interlayer insulating layer 33, and thefifth interlayer insulating layer 35 may include silicon oxide, and thefourth interlayer insulating layer 34 may include silicon nitride.

Each of the plurality of middle interconnections 41 and 42 and theplurality of contact plugs 52 may include or be formed of a conductivematerial, such as a metal, a metal nitride, a metal silicide, a metaloxide, polysilicon, a conductive carbon, or a combination thereof. Eachindividual middle interconnection 41 or 42 may have an integralstructure formed of a continuous, monolithic material. In an embodiment,the plurality of first middle interconnections 41 may be formed in thefirst interlayer insulating layer 31. The plurality of second middleinterconnections 42 may be formed in the second interlayer insulatinglayer 32. Each of the plurality of second middle interconnections 42 mayexhibit a first thickness d1.

The plurality of contact plugs 52 may extend into one or more of theplurality of interlayer insulating layers 31, 32, 33, 34, and 35. In anembodiment, each of the plurality of contact plugs 52 passes through thefifth interlayer insulating layer 35, the fourth interlayer insulatinglayer 34, and the third interlayer insulating layer 33 and contacts acorresponding one of the plurality of second middle interconnections 42.The formation of the plurality of middle interconnections 41 and 42 andthe plurality of contact plugs 52 may include a plurality of thin-filmforming processes and a patterning process.

The pad 61 and the plurality of upper interconnections 62 may be formedon the fifth interlayer insulating layer 35. The formation of the pad 61and the plurality of upper interconnections 62 may include a thin-filmforming process and a patterning process. The pad 61 and each of theplurality of upper interconnections 62 may include or be formed of aconductive material, such as a metal, a metal nitride, a metal silicide,a metal oxide, polysilicon, a conductive carbon, or a combinationthereof. The pad 61 and each of the plurality of upper interconnections62 may include a single layer or a multi-layered structure. The pad 61and each of the plurality of upper interconnections 62 may each haveintegral structure formed of a continuous, monolithic material. In anembodiment, the pad 61 and each of the plurality of upperinterconnections 62 may include or be formed of aluminum (Al), copper(Cu), nickel (Ni), cobalt (Co), silver (Ag), platinum (Pt), ruthenium(Ru), tungsten (W), tungsten nitride (WN), titanium (Ti), titaniumnitride (TiN), tantalum (Ta), tantalum nitride (TaN), or a combinationthereof.

The plurality of middle interconnections 41 and 42 may be formed betweenthe pad 61 and the substrate 21. The pad 61 and each of the plurality ofupper interconnections 62 may contact at least a corresponding one ofthe plurality of contact plugs 52. In an embodiment, from among theplurality of middle interconnections 41 and 42, a selected one of theplurality of second middle interconnections 42 is closest to a center ofthe pad 61, from a top-down view.

The pad 61 may exhibit a second thickness d2. Each of the plurality ofupper interconnections 62 may exhibit a third thickness d3. In anembodiment, the pad 61 and the plurality of upper interconnections 62may include and be formed of the same material formed simultaneously.The third thickness d3 may be substantially equal to the secondthickness d2. The pad 61 and the plurality of upper interconnections 62may be formed at substantially the same vertical level. The secondthickness d2 may be greater than the first thickness d1. The secondthickness d2 may be twice to 100 times the first thickness d1. Thesecond thickness d2 may be 1 μm or more. In an embodiment, the secondthickness d2 may range from 1 μm to 5 μm. For example, the secondthickness d2 may be about 2.5 μm.

Each of the plurality of upper interconnections 62 may be formedadjacent to the pad 61 (e.g., in a horizontal direction). Each gap G1between the plurality of upper interconnections 62 and the pad 61 may be1 μm or more. Each of the gaps G1 between the plurality of upperinterconnections 62 and the pad 61 may range from 1 μm to 10 μm. In anembodiment, each of the gaps G1 may range from 2.5 μm to 7.2 μm. Each ofthe gaps G1 between the plurality of upper interconnections 62 and thepad 61 may be greater than or equal to the second thickness d2.

Referring to FIG. 13 , a first protective insulating layer 71 is formedon the fifth interlayer insulating layer 35. The first protectiveinsulating layer 71 may cover the pad 61, the plurality of upperinterconnections 62, and the gaps G1 between the pad 61 and theplurality of upper interconnections 62. The first protective insulatinglayer 71 may include or be formed of silicon oxide, silicon nitride,silicon oxynitride, a low-k dielectric, or a combination thereof. In anembodiment, the first protective insulating layer 71 may include asilicon oxide layer formed using tetraethylorthosilicate (TEOS). Anupper surface of the first protective insulating layer 71 may be formedat a higher level than uppermost ends (e.g., top surfaces) of the pad 61and the plurality of upper interconnections 62.

Referring to FIG. 14 , the upper surface of the first protectiveinsulating layer 71 may be formed using a planarization process to besubstantially planar. The planarization process may include a chemicalmechanical polishing (CMP) process, an etchback process, or acombination thereof. In an embodiment, the first protective insulatinglayer 71 covers the pad 61, the plurality of upper interconnections 62,and the gaps G1 between the pad 61 and the plurality of upperinterconnections 62.

Referring to FIG. 15 , a second protective insulating layer 72 is formedon the first protective insulating layer 71. The second protectiveinsulating layer 72 may include a different material from the firstprotective insulating layer 71. In an embodiment, the second protectiveinsulating layer 72 includes silicon nitride. The second protectiveinsulating layer 72 may cover the upper surface of the first protectiveinsulating layer 71 with a constant thickness. An upper surface of thesecond protective insulating layer 72 may be formed to be substantiallyplanar.

Referring to FIG. 16 , an opening 73W may be formed using a patterningprocess to pass through the second protective insulating layer 72 andthe first protective insulating layer 71 and expose an upper surface ofthe pad 61. In an embodiment, the opening 73W may be arranged within acenter of the pad 61. An edge of the pad 61 may remain covered by thefirst protective insulating layer 71 and the second protectiveinsulating layer 72. The opening 73W may exhibit various cross-sectionalshapes such as a rectangular shape, or a trapezoidal shape having alower horizontal width smaller than an upper horizontal width thereof.In the following descriptions, the lower and upper horizontal widths ofthe opening 73W may be assumed to be substantially the same. From atop-down view, the opening 73W may have a circular shape, a square orrectangular shape, or a linear shape, for example.

Referring to FIG. 17 , a barrier layer 81 and a seed layer 82 aresequentially formed on the second protective insulating layer 72. Thebarrier layer 81 may include or be formed of titanium (Ti), titaniumnitride (TiN), tantalum (Ta), tantalum nitride (TaN), or a combinationthereof. The seed layer 82 may include or be formed of copper (Cu). Thebarrier layer 81 may extend into the opening 73W. The barrier layer 81contact the upper surface of the pad 61. The seed layer 82 conformallycovers an upper surface of the barrier layer 81.

Referring to FIG. 18 , a mask pattern 80 is formed on the seed layer 82.A pillar 83 is formed on the seed layer 82. The pillar 83 may include orbe formed of nickel (Ni), copper (Cu), aluminum (Al), silver (Ag),platinum (Pt), ruthenium (Ru), tin (Sn), gold (Au), tungsten (W),tungsten nitride (WN), titanium (Ti), titanium nitride (TiN), tantalum(Ta), tantalum nitride (TaN), or a combination thereof. For example, thepillar 83 may include a nickel layer. The pillar 83 may be formed usingan electroplating process. The pillar 83 may be defined by the maskpattern 80.

The barrier layer 81, the seed layer 82, and the pillar 83 mayconstitute a pillar structure 85. The pillar structure 85 may include afirst portion 85A and a second portion 85B. The first portion 85A may bearranged on the opening 73W. The second portion 85B may extend on thesecond protective insulating layer 72. The second portion 85B mayoverlap the edge of the pad 61, the plurality of upper interconnections62, and the gaps G1 between the pad 61 and the plurality of upperinterconnections 62.

An upper surface of the first portion 85A may be closer to the substrate21 than an upper surface of the second portion 85B is to the substrate.A lower surface of the second portion 85B may be formed to besubstantially planar. The upper surface of the second portion 85B may beformed to be substantially planar.

Referring to FIG. 19 , a solder 87 is formed on the pillar structure 85.The solder 87 may include or be formed of Sn, Ag, Cu, Ni, Au, or acombination thereof. For example, the solder 87 may be a Sn—Ag—Cu layer.An interfacial metal layer may be further formed between the pillarstructure 85 and the solder 87, but a description thereof will beomitted for brevity.

Referring again to FIGS. 1 and 19 , the mask pattern 80 may be removedto expose side surfaces of the pillar 83 and the solder 87. The seedlayer 82 and the barrier layer 81 may be partially removed to partiallyexpose the upper surface of the second protective insulating layer 72.The seed layer 82 and the barrier layer 81 may be defined between thepad 61 and the pillar 83, between the second protective insulating layer72 and the pillar 83 on the edge of the pad 61, between the secondprotective insulating layer 72 and the pillar 83 on the gaps G1 betweenthe pad 61 and the plurality of upper interconnections 62, and betweenthe second protective insulating layer 72 and the pillar 83 on theplurality of upper interconnections 62.

The solder 87 may be rounded using an annealing process such as a reflowprocess. In an embodiment, a lateral width of the solder 87 may begreater than that of the pillar 83. An upper surface of the solder 87may have a curved, hemispherical shape.

FIGS. 20 to 22 are cross-sectional views for describing methods offorming semiconductor devices according to embodiments of the inventiveconcept.

Referring to FIG. 20 , an upper surface of a first protective insulatinglayer 71 may be formed using a planarization process to be substantiallyplanar. Upper surfaces of the first protective insulating layer 71, apad 61, and a plurality of upper interconnections 62 may besubstantially coplanar and exposed. The first protective insulatinglayer 71 may fill gaps G1 between the pad 61 and the plurality of upperinterconnections 62.

Referring to FIG. 21 , a third protective insulating layer 74 is formedon the first protective insulating layer 71, the pad 61, and theplurality of upper interconnections 62. A second protective insulatinglayer 72 may be formed on the third protective insulating layer 74. Thethird protective insulating layer 74 may include a different materialfrom the second protective insulating layer 72. For example, each of thefirst protective insulating layer 71 and the third protective insulatinglayer 74 may include a silicon oxide layer formed usingtetraethylorthosilicate (TEOS). The second protective insulating layer72 may include a silicon nitride layer. Each of upper surfaces of thefirst protective insulating layer 71, the third protective insulatinglayer 74, and the second protective insulating layer 72 may be formed tobe substantially planar.

Referring to FIG. 22 , an opening 73W may be formed using a patterningprocess to pass through the second protective insulating layer 72 andthe third protective insulating layer 74 and expose the upper surface ofthe pad 61.

According to the example embodiments of the inventive concept, a pad andan upper interconnection can be provided that have thicknesses which areat least twice a thickness of a middle interconnection. A protectiveinsulating layer can cover an edge of the pad, the upperinterconnection, and a gap between the pad and the upper interconnectionand have an opening on the pad. A bump can be disposed on the pad. Thebump can extend on the protective insulating layer and overlap the upperinterconnection. The gap between the pad and the upper interconnectioncan be 1 μm or more. An upper surface of the protective insulating layercan be substantially planar. A semiconductor device having excellentcurrent drivability, a high signal transmission rate, and highphysical/chemical reliability can be implemented.

While the embodiments of the inventive concept have been described withreference to the accompanying drawings, it should be understood by thoseskilled in the art that various modifications may be made withoutdeparting from the scope of the inventive concept and without changingessential features thereof. Therefore, the above-described embodimentsshould be considered in a descriptive sense only and not for purposes oflimitation.

1-20. (canceled)
 21. A semiconductor device comprising: a firstsemiconductor chip and a second semiconductor chip adjacent to eachother in a first direction, the first semiconductor chip comprising, afirst substrate having a first front surface and a first rear surfaceopposite to each other; first interconnections on the first frontsurface of the first substrate; a first interlayer insulating layercovering the first interconnections; a first pad and first wirings onthe first interlayer insulating layer, and electrically connected to thefirst interconnections; a first protective insulating layer covering thefirst pad and the first wirings and having a first opening exposing aportion of the first pad; a first bump on the first protectiveinsulating layer and electrically connected to the first pad; a firstprotruding electrode on the first rear surface of the first substrate;and a first through electrode extending in the first substrate in thefirst direction and electrically connecting the first protrudingelectrode and the first interconnections to each other, the secondsemiconductor chip comprising, a second substrate having a second frontsurface and a second rear surface opposite to each other; secondinterconnections on the second front surface of the second substrate; asecond interlayer insulating layer covering the second interconnections;a second pad and second wirings on the second interlayer insulatinglayer, and electrically connected to the second interconnections; asecond protective insulating layer covering the second pad and thesecond wirings and having a second opening exposing a portion of thesecond pad; and a second bump on the second protective insulating layerand including a pillar structure electrically connected to the secondpad and a solder connecting the pillar structure and the firstprotruding electrode, wherein a thickness of the second pad in the firstdirection is greater than a thickness of each of the secondinterconnections in the first direction, wherein a width of a gapbetween the second pad and the second wirings adjacent to each other ina second direction, perpendicular to the first direction, is greaterthan or equal to the thickness of the second pad in the first direction,wherein the pillar structure has a first side having a convex portionwithin the second opening of the second protective insulating layer, anda second side having a concave portion aligned with the convex portionin the first direction, wherein the second side is in contact with thesolder of the second bump, wherein the first protruding electrode has athird side in contact with the solder of the second bump andsubstantially flat, wherein the second protective insulating layerincludes a first protective layer on the second pad and the secondwirings, a second protective layer on the first protective layer, and athird protective layer on the second protective layer, and wherein thesecond opening of the second protective insulating layer has a narrowregion penetrating through the first and second protective layers, and awide region penetrating through the third protective layer and exposinga portion of the second protective layer in the first direction.
 22. Thesemiconductor device as claimed in claim 21, wherein the thickness ofthe second pad is twice to 100 times the thickness of each of the secondinterconnections.
 23. The semiconductor device as claimed in claim 21,wherein a thickness of the second wirings in the first direction issubstantially equal to the thickness of the second pad.
 24. Thesemiconductor device as claimed in claim 21, wherein the thickness ofthe second pad is 1 μm or more.
 25. The semiconductor device as claimedin claim 21, wherein the thickness of each of the secondinterconnections is less than 1 μm.
 26. The semiconductor device asclaimed in claim 21, wherein the width of the gap between the second padand the second wirings adjacent to each other is 1 μm or more.
 27. Thesemiconductor device as claimed in claim 21, wherein the convex portionof the pillar structure contacts the second pad.
 28. The semiconductordevice as claimed in claim 21, wherein the concave portion of the pillarstructure is recessed from the second side of the pillar structuretoward the first side of the pillar structure.
 29. The semiconductordevice as claimed in claim 21, wherein the concave portion of the pillarstructure overlaps the convex portion of the pillar structure in thefirst direction.
 30. The semiconductor device as claimed in claim 21,wherein a thickness of the second protective layer in the firstdirection is smaller than a thickness of the first protective layer inthe first direction and a thickness of the third protective layer in thefirst direction.
 31. The semiconductor device as claimed in claim 21,wherein the first protective layer includes silicon oxide, the secondprotective layer includes silicon nitride, and the third protectivelayer includes photosensitive polyimide (PSPI).
 32. The semiconductordevice as claimed in claim 21, wherein the wide region of the secondopening has a first inner wall defined by the third protective layer,and the first inner wall of the wide region is tapered towards thenarrow region of the second opening.
 33. The semiconductor device asclaimed in claim 32, wherein the narrow region of the second opening hasa second inner wall defined by the first protective layer and the secondprotective layer, and the second inner wall of the narrow region hasangles relative to the second direction greater than that of the firstinner wall of the wide region.
 34. A semiconductor device comprising: afirst semiconductor chip and a second semiconductor chip adjacent toeach other in a first direction, the first semiconductor chipcomprising, a first substrate having a first front surface and a firstrear surface opposite to each other; a first bump on the first frontsurface of the first substrate; a protruding electrode on the first rearsurface of the first substrate; and a through electrode extending in thefirst substrate in the first direction and electrically connecting theprotruding electrode and the first bump to each other, the secondsemiconductor chip comprising, a second substrate having a second frontsurface and a second rear surface opposite to each other, the secondfront surface facing the first rear surface of the first substrate;interconnections on the second front surface of the second substrate; aninterlayer insulating layer covering the interconnections; a pad andwirings on the interlayer insulating layer, and electrically connectedto the interconnections; a protective insulating layer covering the padand the wirings and having an opening exposing a portion of the pad; anda second bump on the opening of the protective insulating layer andincluding a pillar structure electrically connected to the pad and asolder electrically connecting the pillar structure and the protrudingelectrode of the first semiconductor chip to each other, wherein athickness of the pad in the first direction is greater than a thicknessof each of the interconnections in the first direction, wherein a widthof a gap between the pad and the wirings adjacent to each other in asecond direction, perpendicular to the first direction, is greater thanor equal to the thickness of the pad in the first direction, wherein thepillar structure has a first side electrically connected to the pad, anda second side electrically connected to the solder of the second bump,and wherein the protruding electrode has a third side electricallyconnected to the solder of the second bump.
 35. The semiconductor deviceas claimed in claim 34, wherein the first semiconductor chip furthercomprises a substrate insulating layer between the first rear surface ofthe first substrate and the protruding electrode, and the throughelectrode penetrates through the substrate insulating layer.
 36. Thesemiconductor device as claimed in claim 34, wherein the first side ofthe pillar structure has a convex portion in contact with the pad, andthe second side of the pillar structure has a concave portion recessedtoward the convex portion.
 37. The semiconductor device as claimed inclaim 34, wherein the third side of the protruding electrode is a planarsurface.
 38. The semiconductor device as claimed in claim 34, whereinthe protective insulating layer include a first protective layer on thepad and the wirings, a second protective layer on the first protectivelayer, and a third protective layer on the second protective layer, andwherein the opening of the protective insulating layer has a firstregion passing through the first and second protective layers, and asecond region passing through the third protective layer.
 39. Thesemiconductor device as claimed in claim 38, wherein a width of thefirst region of the opening in the second direction is smaller than thatof the second region of the opening.
 40. A semiconductor devicecomprising: a first semiconductor chip and a second semiconductor chipadjacent to each other in a first direction, the first semiconductorchip comprising, a first substrate having a first front surface and afirst rear surface opposite to each other; a first bump on the firstfront surface of the first substrate; a protruding electrode on thefirst rear surface of the first substrate; and a through electrodeextending in the first substrate in the first direction and electricallyconnecting the protruding electrode and the first bump to each other,the second semiconductor chip comprising, a second substrate having asecond front surface and a second rear surface opposite to each other,the second front surface facing the first rear surface of the firstsubstrate; interconnections on the second front surface of the secondsubstrate; an interlayer insulating layer covering the interconnections;a pad on the interlayer insulating layer, and electrically connected tothe interconnections; a protective insulating layer covering the pad;and a second bump on the protective insulating layer and including apillar structure electrically connected to the pad and a solder on thepillar structure, wherein a thickness of the pad in the first directionis greater than a thickness of each of the interconnections in the firstdirection, wherein the pillar structure has a first convex portion incontact with the pad passing through the protective insulating layer,wherein the solder has a second convex portion overlapping the firstconvex portion of the pillar structure in the first direction, whereinthe protruding electrode has a planar surface in contact with thesolder, and wherein the first convex portion includes a first horizontalsurface in contact with the pad, and a second horizontal surface spacedapart from the pad in the first direction, the second horizontal surfacehas a step difference from the first horizontal surface.